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Conferences > CLEOPR > 2009 > ThD1 > ThD1_1
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper ThD1_1

Femtosecond Laser Irradiation for Functional Micro-/Nanostructure Fabrication

Minghui Hong, Zaichun Chen, Min Tang, Luping Shi, and Tow Chong Chong

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Abstract

Femtosecond laser is a unique processing tool to make micro-/nanostructures on heat sensitive bio-polymer film & glass substrate, to create 3D structures inside glass, to achieve 20-nm nanostructuring and large-area THz, micro-mold and micro-device patterning.

© 2009 IEEE

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