Abstract
Al2O3 thin films were characterized by optical and structural properties, as well as LIDT under 355 nm Nd: YAG laser. It was found that the deposition temperature had no clear effect on the LIDT in our experiments.
© 2009 IEEE
PDF ArticleAl2O3 thin films were characterized by optical and structural properties, as well as LIDT under 355 nm Nd: YAG laser. It was found that the deposition temperature had no clear effect on the LIDT in our experiments.
© 2009 IEEE
PDF Article