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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper TUP9_3

Influence of deposition temperature on the properties of A12O3 thin films*

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Abstract

Al2O3 thin films were characterized by optical and structural properties, as well as LIDT under 355 nm Nd: YAG laser. It was found that the deposition temperature had no clear effect on the LIDT in our experiments.

© 2009 IEEE

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