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Conferences > CLEOPR > 2009 > TUP > TUP10_5
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper TUP10_5

Femtosecond laser gratings micromachining on PDMS plates

Linwei Zhu, Changhe Zhou, Tengfei Wu, and Jin Xie

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Abstract

We report on the femtosecond laser miscromachining of diffraction gratings on PDMS (polydimethylsiloxane) plate. By scanning the planar PDMS plate, using the optical X-Y-Z stages, the embedded diffraction gratings in PDMS plate was fabricated successfully.

© 2009 IEEE

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