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Conferences > CLEOPR > 2009 > MJ1 > MJ1_2
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper MJ1_2

Femtosecond laser stereolithography and replication technique for MEMS application

Shoji Maruo

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Abstract

Several types of optically driven micromachines such as a lobed micropump, viscous micropumps and micromanipulators were developed using two-photon microstereolithography. The movable microdevices can be reproduced by a membrane-assisted transfer molding process.

© 2009 IEEE

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