The MgxZn1-xO thin films for x varying from 0 to 0.36 were deposited by RF magnetron sputtering. The MgxZn1-xO films are characterized by x-ray diffraction and UV-visible spectroscopy. The MgxZn1-xO metal-semiconductor-metal ultraviolet photocodetectors (MSM-UPDs) were fabricated. We also investigated the electrical and optical properties of the MSM-UPDs.

© 2007 IEEE

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