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Conferences > CLEOPR > 2007 > ThP > ThP_040
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper ThP_040

Fabrication of Thin Film Titania with Nanopoles and Nanopipes

Hyun-Jung Her, Woon-Hyuk Baek, Jaewan Kim, Y. J. Choi, C. J. Kang, and Yong-Sang Kim

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Abstract

We demonstrate a formation of thin film titania (TiO2) with dense array of nanopores, nanopoles, and nanopipes. The heights of pores, poles and pipes are about 130 nm, 180 nm, 200 nm, respectively. The aspect ratio of these three structures is approximated between 2 and 3.

© 2007 IEEE

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