Abstract

Wheel- and disk-shaped Si optomechanical resonators are demonstrated with frequency up to 1.75 GHz and mechanical <i>Q</i> factors as high as 4370 at 1.41 GHz measured in air. Displacement sensitivity of 4.16×10<sup>−17</sup> m/Hz<sup>1/2</sup> is achieved.

© 2012 OSA

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