Abstract

We demonstrate optical manipulation of 1-?m-sized polystyrene beads in a silicon-based integrated optofluidic device. The relative velocity of the optically driven microbeads is ~14.2 ?m/s and ~3.5 ?m/s using 0.7-?m and 0.5-?m-thick silicon nitride waveguides.

© 2010 The Optical Society

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