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Patterning of metal electrode on flexible substrate using laser transfer method

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Abstract

Through incorporating with the technique of rapid polydimethysiloxane (PDMS) lift-off, this study reports on a new laser transfer method that is applicable to printing metallic thin film on a flexible substrate. Aluminum line patterns, with line widths of 40 and 100 μm and deposited on poly(ethylene terephthalate) (PET) substrate, are presented. The patterned film is demonstrated to be a good conductor, with resistivity of 2.95×10−6 Ω-cm, and with very good adhesion strength through the scotch-tape test.

© 2010 Optical Society of America

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