Abstract

An array of polymer microlenses, made of 32×32 individual elements spaced by a 50-µm pitch, is used in connection to an array of 32×32 6-µm diameter SPADs (Single Photon Avalanche Detector), with the aim of mitigating the loss in sensitivity due to the area fill-factor. The lens array is fabricated by polymer casting in a photoresist replica mold. Results about repeatability of concentration factor and back focal length are reported. At C= 35 and a focal length F=40 µm, the spread of concentration is < 6%, and that of BFL is <0.5 µm.

© 2010 Optical Society of America

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription