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Conferences > CLEO > 2010 > CThW > CThW4

Photonic Devices in Low-Temperature Laser-Crystallized Deposited Silicon

Kyle Preston, Carl B. Poitras, Michael O. Thompson, and Michal Lipson

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Abstract

We demonstrate integrated optical devices in deposited silicon crystallized at room temperature for 3D photonic integration. These devices can enable electro-optic switching and modulation on low-temperature substrates such as glass, plastic, and post-back-end CMOS wafers.

© 2010 Optical Society of America

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