Abstract

This paper reports on the co-fabrication of photonic whispering gallery mode disk resonators and RF MEMS radial contour mode resonators on the same SOI substrate. By mechanically coupling the MEMS and photonic resonators, we have demonstrated a silicon RF MEMS based optical modulator which can modulate light with wavelength 1560 nm at 288 MHz.

© 2010 Optical Society of America

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