Optical Trap Assisted Nanopatterning for Structured Surfaces

Romain Fardel; Yu-Cheng Tsai; Craig B. Arnold

doi:10.1364/CLEO.2010.CMR2

Conference on Lasers and Electro-Optics 2010
OSA Technical Digest (CD) (Optica Publishing Group, 2010),
paper CMR2
•https://doi.org/10.1364/CLEO.2010.CMR2

Optical Trap Assisted Nanopatterning for Structured Surfaces

Romain Fardel, Yu-Cheng Tsai, and Craig B. Arnold

Conference on Lasers and Electro-Optics 2010

San Jose, California United States
16–21 May 2010
ISBN: 978-1-55752-889-6

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Laser Nanostructuring (CMR)

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R. Fardel, Y. Tsai, and C. B. Arnold, "Optical Trap Assisted Nanopatterning for Structured Surfaces," in Conference on Lasers and Electro-Optics 2010, OSA Technical Digest (CD) (Optica Publishing Group, 2010), paper CMR2.

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Abstract

We investigate the use of optical trap assisted nanopatterning for creating nanoscale features on surfaces with pre-existing topography. Uniform patterns over silicon and polyimide surfaces with several micrometer deep grooves are demonstrated.

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