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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper JTuF2
  • https://doi.org/10.1364/CLEO.2009.JTuF2

Digital deterministic control of slow light in photonic crystal waveguide membranes through atomic layer deposition

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Abstract

We present for the first time digital and deterministic control of slow-light in photonic crystal silicon membranes through atomic layer deposition. Supported by ab initio calculations and our earlier advancements, the tuning of the slow group indices and higher-order dispersion characteristics are observed in the chip-scale Mach-Zehnder interferometers, along with control of the surface-state coupling. This deterministic control is a CMOS process that unambiguously tunes the slow-light dispersion for ultrahigh-bandwidth delay lines and nonlinear nanophotonics.

© 2009 Optical Society of America

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