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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CTuV1
  • https://doi.org/10.1364/CLEO.2009.CTuV1

CMOS-Integrated Small-Capacitance Germanium Waveguide Photodetector for Optical Interconnects

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Abstract

Compact germanium waveguide photodetector with 38fF capacitance, 40Gbps bandwidth and 0.4A/W responsivity is demonstrated. High-quality Ge-on-insulator singlecrystalline layer was monolithically integrated into front-end CMOS process by lateral seeded crystallization.

© 2009 Optical Society of America

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