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Conferences > CLEO > 2009 > CTuEE > CTuEE3
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CTuEE3
  • •https://doi.org/10.1364/CLEO.2009.CTuEE3

Low loss stoichiometric TeO2 thin films and waveguides

Khu T. Vu, Steve J. Madden, and Barry Luther-Davies

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Abstract

Stoichiometric low loss Tellurium dioxide, TeO2, films have been produced by reactive magnetron RF sputtering. Long rib waveguides with very low loss are fabricated using reactive ion etching techniques. As-deposited TeO2 films and waveguides with propagation loss around or below 0.1dB/cm at 1550nm have been achieved.

© 2009 Optical Society of America

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