Abstract

Imaging interferometric microscopy resolution to λ/2(n<sup>sub</sup>+1) (n<sup>sub</sup> <sup/>= substrate refractive index) is demonstrated using evanescent-wave illumination. Resolution to 150 nm (λ/4.2) is achieved using a 633 nm source and a 0.4 NA lens.

© 2009 The Optical Society

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