Double-layered, self-aligned, silicon photonic crystals are fabricated using directional and isotropic etches – a potential step towards 3D PCs. One structure shows sharper resonances compared to corresponding single layer structure. Another shows high, broadband reflectivity.

© 2008 Optical Society of America

PDF Article
More Like This
Interface Quality Control of Monolithic Photonic Crystals by Hydrogen Annealing

Sora Kim, Rishi Kant, Sanja Hadzialic, Roger T. Howe, and Olav Solgaard
CFY5 Conference on Lasers and Electro-Optics (CLEO) 2008

Double-layer silicon waveguides in standard silicon for 3D photonics

Chia-Ming Chang and Olav Solgaard
JTu4A.52 CLEO: Applications and Technology (CLEO_AT) 2013

Digital Resonance Tuning of High-Q/Vm Silicon Photonic Crystal Nanocavities by Atomic Layer Deposition

Charlton J. Chen, Xiaodong Yang, Chad A. Husko, and Chee Wei Wong
CThCC2 Conference on Lasers and Electro-Optics (CLEO) 2008


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription