Abstract

We present nano-electromechanical optoelectronic (NEMO) tunable VCSELs utilizing ultra-thin electrostatic-actuated single-layer (140nm), high-contrast subwavelength grating designed to strongly reflect TE-polarized light. A 2mW single-mode (SMSR ~45dB) VCSEL with ultra-fast tuning speed ~90 ns is demonstrated.

© 2008 Optical Society of America

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