Picometrology of Ultra-thin Gold Film by Spinning-Disc Interferometry

Xuefeng Wang; D.D. Nolte

Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
OSA Technical Digest (CD) (Optica Publishing Group, 2008),
paper CMEE6

Picometrology of Ultra-thin Gold Film by Spinning-Disc Interferometry

Xuefeng Wang and D.D. Nolte

Conference on Lasers and Electro-Optics 2008

San Jose, California United States
4–9 May 2008
ISBN: 978-1-55752-859-9

From the session
Advanced Optical Length Metrology (CMEE)

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X. Wang and D. D. Nolte, "Picometrology of Ultra-thin Gold Film by Spinning-Disc Interferometry," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optica Publishing Group, 2008), paper CMEE6.

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Abstract

We obtain the complex refractive index of ultra-thin gold film (down to 20 picometers) on thermal oxide on silicon by the combination of in-line (IL) and differential-phase-contrast (DPC) channels of spinning-disc interferometry (SDI)

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