Flexible, Large-Area Metamaterials Fabricated on Thin Silicon Nitride Membranes

X. G. Peralta; X. G. Peralta; C. L. Arrington; M. C. Wanke; I. Brener; I. Brener; J. D. Williams; E. Smirnova; A. J. Taylor; J. F. O’Hara; A. Strikwerda; R. D. Averitt; W. J. Padilla

Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
OSA Technical Digest (CD) (Optica Publishing Group, 2008),
paper CFY4

Flexible, Large-Area Metamaterials Fabricated on Thin Silicon Nitride Membranes

X. G. Peralta, C. L. Arrington, M. C. Wanke, I. Brener, J. D. Williams, E. Smirnova, A. J. Taylor, J. F. O’Hara, A. Strikwerda, R. D. Averitt, and W. J. Padilla

Conference on Lasers and Electro-Optics 2008

San Jose, California United States
4–9 May 2008
ISBN: 978-1-55752-859-9

From the session
Subwavelength Structuring of Optical Materials (CFY)

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X. G. Peralta, C. L. Arrington, M. C. Wanke, I. Brener, J. D. Williams, E. Smirnova, A. J. Taylor, J. F. O’Hara, A. Strikwerda, R. D. Averitt, and W. J. Padilla, "Flexible, Large-Area Metamaterials Fabricated on Thin Silicon Nitride Membranes," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optica Publishing Group, 2008), paper CFY4.

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Abstract

We present terahertz metamaterials fabricated on large-area, free-standing thin (≤1 μm) silicon nitride membranes with the aim of reducing dielectric losses, enhancing metamaterial sensing capabilities, and enabling flexible and conformable designs.

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