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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CTuW5

Soft X-Ray Contact Imaging of Thin Films by a Laser-Plasma Source

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Abstract

Quantitative analysis of nanometric films is achieved by soft X-ray imaging using a laser-plasma source and LiF crystals as detectors. Excitation of color center fluorescence in exposed LiF allows image detection with sub-micron resolution.

© 2007 Optical Society of America

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