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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CTuJ7

Self-zooming stable stage with sub-nm resolution using femtosecond frequency comb

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Abstract

A positioning system based on self-zooming laser interferometer is presented. It uses diode lasers locked to two modes of fs-comb. It provides sub-nm resolution and sub-nm accuracy.

© 2007 Optical Society of America

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