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Conferences > CLEO > 2007 > CTuG > CTuG5
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CTuG5

Metallic-Contamination-Induced Optical Loss in Silicon Microphotonic Waveguides

Tymon Barwicz, Charles W. Holzwarth, Peter T. Rakich, Milos A. Popovic, Erich I. Ippen, and Henry I. Smith

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Abstract

We report on optical loss reaching 100 dB/cm observed in Si wire waveguides defined by reactive-ion etching in the proximity of metals with a low temperature of silicide formation.

© 2007 Optical Society of America

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