T. H. Stievater, W. S. Rabinovich, D. Park, J. B. Khurgin, and S. Kanakaraju, "Micromachined Quantum-Well Air-Clad Waveguides,"
in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies,
OSA Technical Digest Series (CD)
(Optical Society of America, 2007), paper CThJJ3.
We have used surface micromachining to fabricate suspended InGaAs quantum well waveguides that are supported by lateral tethers. Their enhanced electro-optical and nonlinear-optical properties will be discussed.