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Conferences > CLEO > 2007 > CThJJ > CThJJ1
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CThJJ1

Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage

Kemiao Jia and Huikai Xie

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Abstract

This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation.

© 2007 Optical Society of America

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