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Conferences > CLEO > 2007 > CMX > CMX3
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CMX3

Table top extreme ultraviolet holography

P. W. Wachulak, R. A. Bartels, M. C. Marconi, C. S. Menoni, and J.J. Rocca

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Abstract

Table top holography with EUV laser was demonstrated. The hologram recorded in a photoresist was digitized with an AFM. The image was reconstructed achieving 380 nm spatial resolution determined using wavelet analysis and image correlation.

© 2007 Optical Society of America

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