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Conferences > CLEO > 2007 > CFQ > CFQ4
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CFQ4

Demonstration of Silicon Microdisk Resonators Compatible with Active Integration: Ultra-high Q and Efficient Waveguide-Resonator Coupling

Mohammad Soltani, Siva Yegnanarayanan, and Ali Adibi

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Abstract

Silicon-on-insulator microdisk resonators with efficient planar-integrated input-output coupling are demonstrated. Two structures of fully-etched and partially-etched microdisk-on- substrate, compatible with active integration are fabricated and compared. Experimental quality factors about 2.5x106 and critical coupling are observed.

© 2007 Optical Society of America

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