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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper JTuD11

Fabrication of high-aspect-ratio microgrooves with laser-assisted wet etching for micro heat pipe

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Abstract

Fabrication of high-aspect-ratio microgrooves with good profile and surface quality is realized using laser-assisted wet etching technique for the application to micro heat pipe.

© 2006 Optical Society of America

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