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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper CMLL5

Observation of integrated circuits by optical-fiber-probe-coupled laser terahertz emission microscope

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Abstract

Observation of integrated circuits by the optical-fiber-probe-coupled laser terahertz emission microscope (LTEM) system is reported. The LTEM image of an operational amplifier active in a circuit is obtained with a spatial resolution ~2 µm.

© 2006 Optical Society of America

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