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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper CTuH5

Micromechanical Resonators with Integrated Optical Waveguides for Sensing Applications

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Abstract

Low-power indium phosphide microelectromechanical systems (MEMS) cantilever resonators with integrated optical waveguides for bio-chemical sensing are presented. Resonant frequencies up to 168.8kHz (Q=26.5) have been measured in air and mass detection of 510fg/100Hz is possible.

© 2005 Optical Society of America

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