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Conferences > CLEO > 2005 > CFG > CFG1
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper CFG1

Development of a Novel Femtosecond Micromachining Workstation Using Spectral Interferometry

A. J. Sabbah, Sudipta Bera, Charles G. Durfee, and Jeff A. Squier

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Abstract

A workstation that enables real-time measurement of the ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method uses spectral interferometry to measure the ablation depth while cutting with an amplified pulse.

© 2005 Optical Society of America

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