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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper JMD4

High-Resolution EUV Imaging using High Harmonic Generation

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Abstract

We use a simple set-up consisting of two multilayer mirrors and a hollow fiber EUV light source to obtain high-resolution EUV images. Magnifications of X20 and X50 are demonstrated.

© 2004 Optical Society of America

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