Interferometric displacement measurement by use of time-shared two-wavelength laser diode

T. Suzuki; M. Mitomi; O. Sasaki

Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
Technical Digest (CD) (Optica Publishing Group, 2004),
paper CTuX3

Interferometric displacement measurement by use of time-shared two-wavelength laser diode

T. Suzuki, M. Mitomi, and O. Sasaki

Conference on Lasers and Electro-Optics 2004

San Francisco, California United States
16–21 May 2004
ISBN: 1-55752-770-9

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Interferometry Applications II (CTuX)

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T. Suzuki, M. Mitomi, and O. Sasaki, "Interferometric displacement measurement by use of time-shared two-wavelength laser diode," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optica Publishing Group, 2004), paper CTuX3.

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Abstract

A displacement sensor that uses both two-wavelength interferometry and a novel two-wavelength laser source is proposed. This system accurately measures displacement to within range of several hundred µm and resolution to within ~3 µm, respectively.

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