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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CThY1

Direct laser fabrication of blazed diffraction gratings on polymer films

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Abstract

Interference between 20ns 193nm ArF laser beams is used for the fabrication of blazed gratings on Cyclotene™ (BCB, Dow) polymer films. The grating shape is tuned for almost complete power diffraction into the 1st order.

© 2004 Optical Society of America

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