We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and t hen gold coated to form a mirror.
© 2004 Optical Society of America
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
Login to access OSA Member Subscription