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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper CWA39

Micro-pillar square resonant cavity channel add-drop filters on silicon-nitride-on-silica: design, fabrication and characterization

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Abstract

Laterally waveguide-coupled micro-pillar square resonant cavity channel add-drop filters have been designed, simulated and fabricated on silicon-nitride-on-silica substrates. Conventional photolithography and plasma etching were employed. Optical characterization of the fabricated filters is in progress.

© 2003 Optical Society of America

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