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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper CFF6

Femtosecond Laser Micromachined Grooves Cut in Silicon with 400 nm and 800 nm Pulses

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Abstract

We present measurements of ablation rates, morphology, and geometry of femtosecond micromachined silicon under various machining conditions: variable pulse energy, variable cutting speed, number of consecutive passes, and wavelength.

© 2003 Optical Society of America

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