Most widely used methods to make silica glass waveguides are ion exchange, plasma deposition, and flame hydrolysis techniques, but they are generally equipment-intensive and require multistep processing.1 In contrast, the sol-gel process is a versatile, flexible, and cost-effective process and thus can find useful application in many areas. Some disadvantages of the sol-gel process, such as multi-coating, high processing temperature and dry etching, which make it somewhat difficult to prepare thick films without cracking, are resolved by a sol-gel process proposed by Najafi et al.2 The influences of the sol-gel process conditions on the optical property are described in detail in the previous work.3 Here, we report on the design and fabrication of a polarization-insensitive 5-channel Arrayed Waveguide Grating (AWG) device.

© 2002 Optical Society of America

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