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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2001),
  • paper CTuM35

Semiconductor quantum wells Imaged by an optical microscope

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Abstract

Examinations of dimensional properties of semiconductor heterostructures, such as interface quality and quantum well layer thickness, require equipments with nanometer-scale resolution, and thus transmission electron microscopy (TEM) technique is exclusively used for this purpose.

© 2001 Optical Society of America

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