Opto-mechanical model of surface micromachined tunable optoelectronic devices

Chien-chung Lin; Wayne A. Martin; James S. Harris

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2001),
paper CTuL3

Opto-mechanical model of surface micromachined tunable optoelectronic devices

Chien-chung Lin, Wayne A. Martin, and James S. Harris

Conference on Lasers and Electro-Optics 2001

Baltimore, Maryland United States
6–10 May 2001
ISBN: 1-55752-662-1

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Optical MEM's (CTuL)

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C. Lin, W. A. Martin, and J. S. Harris, "Opto-mechanical model of surface micromachined tunable optoelectronic devices," in Conference on Lasers and Electro-Optics, J. Kafka, K. Vahala, R. Williamson, and A. Willner, eds., OSA Technical Digest (Optica Publishing Group, 2001), paper CTuL3.

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Abstract

Surface micromachining of deformable mirror has been widely applied in wavelength tunable optoelectronic devices.¹

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