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Conferences > CLEO > 2001 > CThL > CThL7
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2001),
  • paper CThL7

Electron and atomic force microscopy studies of femtosecond laser machining of Si, GaAs and InP

A. Borowiec, M. MacKenzie, G. C. Weatherly, and H. K. Haugen

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Abstract

The application of femtosecond light pulses to materials processing has recently become a topic of great interest.1

© 2001 Optical Society of America

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