Micromachining of diamond using near-fleld scanning optical microscope

Igor I. Smolyaninov; Christopher C. Davis

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2001),
paper CFG6

Micromachining of diamond using near-fleld scanning optical microscope

Igor I. Smolyaninov and Christopher C. Davis

Conference on Lasers and Electro-Optics 2001

Baltimore, Maryland United States
6–10 May 2001
ISBN: 1-55752-662-1

From the session
Laser Micromachining II (CFG)

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I. I. Smolyaninov and C. C. Davis, "Micromachining of diamond using near-fleld scanning optical microscope," in Conference on Lasers and Electro-Optics, J. Kafka, K. Vahala, R. Williamson, and A. Willner, eds., OSA Technical Digest (Optica Publishing Group, 2001), paper CFG6.

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Abstract

Diamond is an attractive material for microelectronic applications because of its excellent dielectric and heal conductance properties.

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