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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2001),
  • paper CFC4

An Introduction to Laser Microfabrication

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Abstract

Miniature devices and microsystems are becoming increasingly important in our everyday lives and laser tools are frequently used to fabricate and interconnect them. However from the perspective of the manufacturing engineer, lasers are just one of several tools that can be utilized in microfabrication.

© 2001 Optical Society of America

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