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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2000),
  • paper CFB3

Multiple Interferometer for real-time position control

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Abstract

Real-time position control of a rigid body over long distances with accuracy at the nanometer level requires active feedback in six degrees of freedom. We are developing a system of multiple Michelson interferometers to meet the position-sensing requirements of X-ray interferometry over displacements up to 5 cm.

© 2000 Optical Society of America

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