Laser driven micro-machine elements

M. E. J. Friese; H. Rubinsztein-Dunlop; J. Gold; P. Hagberg

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1999),
paper JTuB3

Laser driven micro-machine elements

M. E. J. Friese, H. Rubinsztein-Dunlop, J. Gold, and P. Hagberg

Conference on Lasers and Electro-Optics 1999

Baltimore, Maryland United States
23–26 May 1999
ISBN: 1-55752-570-6

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Optical Micro-Instruments (JTuB)

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M. E. J. Friese, H. Rubinsztein-Dunlop, J. Gold, and P. Hagberg, "Laser driven micro-machine elements," in Conference on Lasers and Electro-Optics, C. Chang-Hasnain, W. Knox, J. Kafka, and K. Vahala, eds., OSA Technical Digest (Optica Publishing Group, 1999), paper JTuB3.

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Abstract

Production of working micro-machines has motivated research into the fabrication of micro-devices, surface engineering of substrates, and driving mechanisms for micro-machines.

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