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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • (Optica Publishing Group, 1998),
  • paper CWS3

Removing particles from glass with ultraviolet laser cleaning

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Abstract

Laser cleaning has been used in a variety of applications, from the technically relevant (e.g., cleaning semiconductor substrates,1 and optical glass surfaces2) to the artistically important (e.g., statuary3).

© 1998 Optical Society of America

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