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Conferences > CLEO > 1998 > CWF > CWF36
  • Conference on Lasers and Electro-Optics
  • (Optica Publishing Group, 1998),
  • paper CWF36

In situ ellipsometric monitoring of growth of zinc oxide thin films with applications to high-frequency fiber acousto-optic components

N.K. Zayer, A.J.C. Grellier, C.N. Pannell, R. Greef, K. Rogers, and M. Zervas

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Abstract

Thin-film acoustic transducers of zinc oxide (ZnO) are currently being investigated by several research groups for application to in fiber or at least fiber-compatible acoustooptic devices operating in the GHz frequency range. RF or DC sputtering is the method of choice for growing these films, although other methods such as pulsed laser deposition (PLD) have also been used.

© 1998 Optical Society of America

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