Novel conical microstructures created in silicon with femtosecond laser pulses

Tsing-Hua Her; Richard J. Finlay; Claudia Wu; Eric Mazur; Shrenik Deliwala

Conference on Lasers and Electro-Optics
(Optica Publishing Group, 1998),
paper CFD6

Novel conical microstructures created in silicon with femtosecond laser pulses

Tsing-Hua Her, Richard J. Finlay, Claudia Wu, Eric Mazur, and Shrenik Deliwala

Conference on Lasers and Electro-Optics 1998

San Francisco, California United States
3–8 May 1998
ISBN: 1-55752-540-4

From the session
Femtosecond Microstructuring (CFD)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
T. Her, R. J. Finlay, C. Wu, E. Mazur, and S. Deliwala, "Novel conical microstructures created in silicon with femtosecond laser pulses," in Conference on Lasers and Electro-Optics, D. Scifres and A. Weiner, eds., (Optica Publishing Group, 1998), paper CFD6.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Save article

Abstract

Silicon wafers are mounted inside a vacuum chamber backfilled with Cl₂, SF₆, N₂, or He and then irradiated with 800-nm pulses from a regeneratively amplified Ti:sapphire laser.

PDF Article

More Like This

Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses

R. Younkin, E. Mazur, I.E. Carey, C. Crouch, J.A. Levinson, and C.M. Friend
CFC3 Conference on Lasers and Electro-Optics (CLEO:S&I) 2001

Silicon Microreflector Created by Single Ultrafast Laser Pulse

Jingyu Zhang, Rokas Drevinskas, Martynas Beresna, Mindaugas Gecevičius, and Peter G. Kazansky
JTh2A.138 CLEO: Applications and Technology (CLEO:A&T) 2014

Two-pulse conical yoked superfluorescence in Rb vapor

A.I. Lvovsky, F. Moshary, and S.R. Hartmann
QWF20 International Quantum Electronics Conference (IQEC) 1998

Previous Article Next Article