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Conferences > CLEO > 1997 > CWF > CWF44
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1997),
  • paper CWF44

Novel metal oxide multilayer reflectors for “water-window” wavelengths by atomic layer deposition

Hiroshi Kumagai, Yasuhiro Iimura, Katsutaro Kobayashi, and Minoru Obara

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Abstract

Since Barbee demonstrated successfully normal-incidence soft-X-ray reflectors with high reflectances over 50% at 13.8 nm by means of 50-layer Mo/Si multilayers deposited by a magnetron sputtering,1 there have been various fabrication studies on soil-X-ray multilayer reflectors with use of electron beam evaporation, and ion beam, RF, and DC magnetron sputtering depositions.

© 1997 Optical Society of America

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